F. Madani-Grasset and Y. Bellouard, "Femtosecond laser micromachining of fused silica molds," Optics Express 18, 21826–21840 (2010).


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The use of low-energy femtosecond laser beam combined with chemical etching has been proven to be an efficient method to fabricate three-dimensional structures in fused silica. For high-volume application, this technology – like other serial processes – suffers from a moderate production rate. Here, we show that femtosecond laser can also be employed to fabricate silica molds and other patterned surfaces, including surfaces with high aspect ratio features. Through appropriate tailoring of silica‟s surface property and subsequent creation of, for instance, simple elastomeric molding, new opportunities for the indirect 3D, multi-scale spatial characterization of deep laser-fabricated microstructures come along. We demonstrate that those moldings are characterized by a high fidelity (down to the nanometer scale) to the silica mold. These results further advance the applicability of femtosecond laser processing to glass.  (Download / PDF)